Low Resistance ALD-NiGe Contact with Phosphorus Segregation on n-Type Germanium
- Year
- 2018
- Author
- Hyun Jun Ahn, Jungmin Moon, Tae In Lee, and Byung Jin Cho
- Conference
- The 25th Korean Conference on Semiconductors
Hyun Jun Ahn, Jungmin Moon, Tae In Lee, and Byung Jin Cho, “Low Resistance ALD-NiGe Contact with Phosphorus Segregation on n-Type Germanium”, The 25th Korean Conference on Semiconductors, Kangwondo, Korea, Feb. 5-7, 2018.
Feb. 5-7, 2018.
Kangwondo, Korea