Leakage current Improvement of Anti-ferroelectric capacitor with Bottom electrode annealing
- Year
- 2020
- Author
- Seung Hwan Lee, Seong Ho Kim, Hyun Jun Ahn, Tae Ho Kim, Sung Won Shin, and Byung Jin Cho
- Conference
- The 27th Korean Conference on Semiconductors
Seung Hwan Lee, Seong Ho Kim, Hyun Jun Ahn, Tae Ho Kim, Sung Won Shin, and Byung Jin Cho, "Leakage current Improvement of Anti-ferroelectric capacitor with Bottom electrode annealing", The 27th Korean Conference on Semiconductors, Kangwondo, Korea, Feburary 12-14. 2020 .
Feburary 12-14. 2020.
Kangwondo, Korea