A Study on the top-tier PMOS fabrication and Performance Improvement of Monolithic 3D Integration Using Green Laser Annealing
- Year
- 2022
- Author
- Youngkeun Park
- Co-author
- Semin Noh, Jaejoong Jeong, Jaecheol Shin, and Byung Jin Cho
- Conference
- The 29th Korean Conference on Semiconductors
Youngkeun Park, Semin Noh, Jaejoong Jeong, Jaecheol Shin, and Byung Jin Cho, "A Study on the top-tier PMOS fabrication and Performance Improvement of Monolithic 3D Integration Using Green Laser Annealing", The 29th Korean Conference on Semiconductors, Kangwondo, Korea, January 24-26. 2022.