Role of Inter-Layer Dielectric on the Electrical and Heat Dissipation Characteristics in the Heterogeneous 3D Sequential CFETs with Ge pFETs on Si nFETs
- Year
- 2023
- Author
- S. -K. Kim
- Co-author
- H. -R. Lim, J. Shim, W. Baek, S. Kim, Y. Park, J. Jeong, J. Lim, J. -P. Kim, J. Jeong, B. -H. Kim, D. -M. Geum, B. -J. Cho, S. -H. Kim*
- Conference
- International Electron Devices Meeting (IEDM)
S. -K. Kim, H. -R. Lim, J. Shim, W. Baek, S. Kim, Y. Park, J. Jeong, J. Lim, J. -P. Kim, J. Jeong, B. -H. Kim, D. -M. Geum, B. -J. Cho, S. -H. Kim, "Role of Inter-Layer Dielectric on the Electrical and Heat Dissipation Characteristics in the Heterogeneous 3D Sequential CFETs with Ge pFETs on Si nFETs", 2023 International Electron Devices Meeting (IEDM), 2023/12, San Francisco, CA, USA, accepted