Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping
- Year
- 2024
- Author
- Seung Hyun Oh
- Co-author
- Chang Hyeon Lee, Hee Tae Kim, Jeong Ik Park, Min Ju Kim, Se Jun Park, Sung Gap Im, Sung Haeng Cho and Byung Jin Cho
- Conference
- 2024 Symposium on VLSI Technology and Circuits (2024 VLSI)
Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping
Accepted
Seung Hyun Oh1, Chang Hyeon Lee1, Hee Tae Kim1, Jeong Ik Park1, Min Ju Kim2, Se Jun Park3, Sung Gap Im1, Sung Haeng Cho4 and Byung Jin Cho1,*
1KAIST, Korea, 2Dankook University, Korea, 3Samsung Electronics, Korea, 4ETRI, Korea *Email: bjcho@kaist.edu