Method for forming element isolating film of semiconductor device
- Inventor
- S. A. Jang, T. S. Song, Y. B. Kim, B. J. Cho, and J. C. Kim
- No.
- 6,027,985
- 출원국가
- 국외
- Date
- 2000
Method for forming element isolating film of semiconductor device
Method for forming element isolating film of semiconductor device