Method for forming field oxide of semiconductor device using wet and dry oxidation
- Inventor
- S. A. Jang, Y. B. Kim, M. S. Joo, B. J. Cho, and J. C. Kim
- No.
- 5,985,738
- 출원국가
- 국외
- Date
- 1999
Method for forming field oxide of semiconductor device using wet and dry oxidation