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Single-crystalline Si based high-performance flexible sensor circuit, and its fabrication method
Inventor
B. J. Cho, J. H. Bong, S. Y. Kim, and M. J. Kim
No.
10-2019-0031331
출원국가
국내
상태
출원
Date
2019
Date
Mar. 2019

Single-crystalline Si based high-performance flexible sensor circuit, and its fabrication method