Method of surface localized pore sealing of porous dielectric constant material
- Inventor
- B. J. Cho, S. G. Im, S. J. Yoon, K. Y. Pak, H. A. Yoon
- No.
- 10-1932763
- 출원국가
- 국내
- Date
- 2018
Method of surface localized pore sealing of porous dielectric constant material